Plasma System

Machine

Low-pressure plasma system V6-G

Efficient tabletop unit

 

Available options

••Vacuum pump

••Ozone trap

••Second gas channel

••Rotating drum for bulk material treatment

••Further options on request

 

This compact low-pressure plasma device is designed as a tabletop unit. A professional PLC control unit serves as a storage for definable process parameters. The standard unit V6-G is designed as a tabletop device for industrial small series production as well as for the low-pressure plasma treatment in R & D laboratories.

 

Technical data

Outer dimensions: approx. W 760 x H 520 x D 510 mm

Inner dimensions process chamber: approx. W 170 x H 170 x D 200 mm

Microwave power generator: 2.45 GHz, variable power 50 W up to max. 300 W

Gas supply: 1 gas channel with mass flow controller and magnetic valve

Vacuum connection: DN 16 KF

Electrical connection: 230 V, 50 / 60 Hz, 0,5 kW (without vacuum pump)

Process control: PLC control unit (PP 35 by B & R)

Vacuum gauge: Pirani

Surface treatment methods: cleaning, activation

Machine

Low Pressure Plasma System V160 - 2G

Designed for: Activation and cleaning

Inside dimensions: 350 x 910 x 510 mm (H x W x D)

Overall dimensions: 1735 x 2800 x 1345 mm (H x W x D)

Process controller: PLC with visualisation unit

Machine

 

Machine

Low Pressure Plasma System V300 - 4GR

Designed for: Cleaning of Drillholes

Outside dimensions: 2110 x 1920 x 910 mm (W x H x D)

Process controller: IPC

Coiling device: max. Diameter: 267 mm max. width: 48 mm

Machine

 

Low-pressure plasma system V55-GKM

The highly flexible standard device

Available Options

••Vacuum pump

••Ozone trap

••Further gas channels

••kHz generator (40 kHz)

••MHz generator (13,56 MHz)

••Rotating drum for bulk material treatment

••Rotating table

••Variable interfaces

••Exhaust gas scrubber

••Automatical door opening and closing (sliding door version)

••Liquiflow controller

••Chamber liner

••Soft-start and slow-vent

••Further frequencies (kHz, MHz) possible

 

Technical data Outer dimensions: approx. W 600 x H 1.850 x D 880 mm

Inner dimensions process chamber: approx. W 400 x H 340 x D 450 mm

Microwave power generator: 2,45 GHz, from 100 W up to max. 1.200 W

Gas supply: 2 gas channels with mass flow controllers and and magnetic valves

Vacuum connection: DN 40 KF

Electrical connection: 230 / 400 V, 50 / 60 Hz, 2,2 kW (without vacuum pump)

Process control: PLC control unit (PP 450 by B & R)

Vacuum gauge: capacitance manometer (independent of gas type)

Printer: 8-pin standard paper printer

Surface treatment methods: cleaning, activation, etching, coating

 

Machine

Low Pressure Plasma System V620 - 2G

Designed for: Activation and cleaning

Basket dimensions: 390 x 690 x 370 mm (H x W x D)

Overall dimensions: 1700 x 3300 x 1200 mm (H x W x D)

Process controller: PLC with visualisation unit